Category：Plasma Glue Remover
Plasma Integrated Solution for Semiconductor Packaging
Microwave plasma debonding machine is a low-voltage microwave plasma debonding system specifically designed for semiconductors. By applying a frequency of 2.45GHz microwave to the window on the wall of the vacuum chamber, a large and continuous amount of Plasma is generated, which enters the chamber for process cleaning of the chip. Suitable for different sizes of material boxes, it can meet different needs and provide customized solutions.
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